微机电系统压电振动台迟滞补偿方法研究

微机电系统(MEMS)压电振动台作为加速度传感器现场标定平台的新秀,能够提供片上物理驱动环境,为加速度传感器的快速重新标定提供持续稳定的加速度信号,然而用于压电振动台驱动的压电材料具有明显的迟滞特性,严重影响平台振动信号的稳定性和连续性.基于上述振动台振动特性,建立基于多项式拟合的压电迟滞模型,采用前馈控制和反馈控制相...

Research on Hysteresis Compensation Method of MEMS Piezoelectric Vibratory Platforms

The MEMS piezoelectric vibratory platforms, as the new candidate for recalibration platforms, could provide the on-chip physical impulse environment to recalibrate the accelerometers by providing a continuous and stable acceleration signals. However, the piezoelectric material used for actuation exhibited clear hysteresis characteristics which seriously affected the stability and the continuity of the harmonic vibration signals. According to the vibratory platform vibration performance, a piezoelectric hysteresis model was established based on polynomial fitting, and the control of platform and compensation of acceleration were realized by combining the feedforward controller and feedback controller. The experimental results show that the maximum acceleration error is reduced from 1. 3g to 0. 05g under the driving conditions of 10 V（317 Hz）sinusoidal voltage.