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基于多分量卷积神经网络的多晶硅晶片颜色差异检测
引用本文:郭保苏,庄集超,章钦,吴凤和. 基于多分量卷积神经网络的多晶硅晶片颜色差异检测[J]. 中国机械工程, 2021, 32(3): 297-304. DOI: 10.3969/j.issn.1004-132X.2021.03.007
作者姓名:郭保苏  庄集超  章钦  吴凤和
作者单位:燕山大学机械工程学院,秦皇岛,066004
基金项目:国家自然科学基金(51605422);河北省自然科学基金(E2017203156,E2017203372)
摘    要:具有复杂纹理的多晶硅晶片颜色差异检测是太阳能电池片制造过程中的一个挑战.针对传统的色差检测算法不适用于颜色差异类别变化大的场合,且分类结果不精确的问题,基于不同分量的颜色特征提出了一种多分量卷积神经网络的检测算法.通过分析多晶硅晶片图像在H SV颜色空间的特征分布,发现颜色特征在H、S和V分量中表现不同;基于全卷积神经...

关 键 词:多晶硅晶片  颜色差异  多分量  卷积神经网络

Color Difference Detection of Polycrystalline Wafers Based on Multi-component Convolution Neural Network
GUO Baosu,ZHUANG Jichao,ZHANG Qin,WU Fenghe. Color Difference Detection of Polycrystalline Wafers Based on Multi-component Convolution Neural Network[J]. China Mechanical Engineering, 2021, 32(3): 297-304. DOI: 10.3969/j.issn.1004-132X.2021.03.007
Authors:GUO Baosu  ZHUANG Jichao  ZHANG Qin  WU Fenghe
Affiliation:College of Mechanical Engineering,Yanshan University,Qinhuangdao,Hebei,066004
Abstract:Color difference detection of polycrystalline wafers with complex textures was a challenge in the manufacturing processes of solar cells. The traditional algorithm in color difference detection was not suitable for situations where the categories of color differences varied greatly, and the classification results were inaccurate. A detection algorithm of multi-component convolution neural network was proposed based on color features of different components. It is found that color features are different in H, S and V components by analyzing the feature distribution of polysilicon wafer images in HSV color spaces. The influences of model depth and convolution kernel size on detection results were evaluated to build the best convolution neural network structure based on full convolution neural network. A multi-component convolution neural network model was constructed based on the best network model to enhance the ability to distinguish different color difference features. The experimental results show that the accuracy, the values of MCC and F1Score of the multi-component convolution neural network are 92.28%, 95.45%, and 94.03% respectively, which has higher detection accuracy than that of other algorithms.
Keywords:polycrystalline wafer   color difference   multi-component   convolutional neural network  
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