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一种考虑端口引线趋肤效应的GaAs PHEMT器件小信号模型
引用本文:章婷婷,刘军,夏颖,张志国.一种考虑端口引线趋肤效应的GaAs PHEMT器件小信号模型[J].半导体技术,2021,46(1):47-52.
作者姓名:章婷婷  刘军  夏颖  张志国
作者单位:杭州电子科技大学射频电路与系统教育部重点实验室,杭州310018;杭州电子科技大学射频电路与系统教育部重点实验室,杭州310018;杭州电子科技大学射频电路与系统教育部重点实验室,杭州310018;北京国联万众半导体科技有限公司,北京100300
基金项目:国家自然科学基金资助项目
摘    要:为了精确地表征高频GaAs赝配高电子迁移率晶体管(PHEMT)的器件特性,提出了一种考虑端口引线趋肤效应的GaAs PHEMT器件小信号模型。采用传输线理论,建立GaAs PHEMT的源-漏电压为0 V情况下沟道的T型等效网络。以量化沟道电阻为中间项,推导出含有趋肤效应模型的拓扑结构并提出参数解析提取方法。结合趋肤效应的高频响应特征,从频率高于40 GHz的测试S参数中剥离10 GHz以下的非本征参数,然后从剥离之后的网络参数中提取趋肤效应模型参数值。采用总栅宽为4×25μm GaAs PHEMT管芯用于模型和模型参数提取方法的验证。结果显示在2~110 GHz下,该模型的仿真结果与测试结果吻合较好。

关 键 词:高频小信号模型  传输线理论  趋肤效应  沟道等效电路  参数提取

A Small Signal Model of the GaAs PHEMTs Considering the Skin Effect of Port Leads
Zhang Tingting,Liu Jun,Xia Ying,Zhang Zhiguo.A Small Signal Model of the GaAs PHEMTs Considering the Skin Effect of Port Leads[J].Semiconductor Technology,2021,46(1):47-52.
Authors:Zhang Tingting  Liu Jun  Xia Ying  Zhang Zhiguo
Affiliation:(Key Laboratory for RF Circuits and Systems,Ministry of Education,Hangzhou Dianzi University,Hangzhou 310018,China;Beijing Advanced Semiconductor Innovation Co.,Ltd.,Beijing 100300,China)
Abstract:In order to accurately characterize the characteristics of high-frequency GaAs pseudomorphic high electron mobility transistor(PHEMT)devices,a small signal model of the GaAs PHEMT device considering the skin effect of port leads was proposed.Based on the transmission line theory,the T-type equivalent network of the GaAs PHEMTs channel was established at a source-drain voltage of 0 V.Taking the quantified channel resistance as the middle term,the topology structure containing the skin effect model was derived and the parameter analysis extraction method was proposed.Combined with the high-frequency response characteristics of the skin effect,extrinsic parameters below 10 GHz were stripped from the test S-parameters with frequencies above 40 GHz.A GaAs PHEMT die with a gate width of 4×25μm was used for model and verification of model parameter extraction method.The results show that the simulation results of this model are in good agreement with the test results at 2-110 GHz.
Keywords:high frequency small signal model  transmission line theory  skin effect  channel equivalent circuit  parameter extraction
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