紫外激光烧蚀铜诱导电子辐射的研究

通过时间分辨技术对XeCl紫外激光烧蚀金属Cu过程中收集板上电荷的时间分辨测量,获取收集板电压信号的时间分辨,分析了激光烧蚀过程中电子与离子到达收集板的特征.结果表明,电子首先从靶面出射,离子紧随其后.收集板上的正、负电压信号分别由激光烧蚀金属Cu产生离子和电子发射而引起,高能电子对环境气体具有碰撞电离的作用.连续辐射的产生与持续时间和收集板上接收电子的负电压信号相对应.结合连续辐射强度的空间分布,对电子辐射的机理进行了探讨.认为电子辐射主要为韧致辐射,韧致辐射来源于近靶处高能电子与等离子体中的粒子相互作用,它是产生连续辐射的主要成因.

Electron radiation mechanism in ultraviolet laser ablation of copper

Based on time-resolved measurement,collector-plate voltage signal produced by XeCl excimer laser ablation of metal Cu was investigated.The properties of electron and ion were analyzed.The experimental results showed that electron and ion were formed in ablation target and that electron was launched first when the metal was ablated by laser.Electron launching resulted in positive voltage signal of collector plate,and ion launching resulted in negative voltage signal of collector plate.Continuum radiation was corresponsive to negative voltage signal of collector plate,and high-kinetic energy electron made ambient ionized.Combined with the spatial distribution of continuum radiation intensity,the electron radiation mechanism was discussed.Electron radiation was bremsstrahlung from high-kinetic energy electron interaction with elemental species near the target,which was the primary mechanism of the continuum radiation.