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激光外差干涉仪光电信号处理方法及特点
引用本文:赵洋 李达成. 激光外差干涉仪光电信号处理方法及特点[J]. 计测技术, 1996, 0(6): 7-9
作者姓名:赵洋 李达成
作者单位:清华大学精密仪器与机械学系!北京市,100084,清华大学精密仪器与机械学系!北京市,100084
摘    要:叙述和分析了外差激光干涉光电信号处理主其特点,指出了它们各自的应用范围,同时介绍了一处新型的光电信号处理方法,它不仅使外差干涉仪用于动态测量,而且可以同时实现高分辩率测量 。

关 键 词:外差干涉 相位测量 信号处理 光电信号

Methods and Characteristics of Opto-Electrical Signal Processing of Laser Heterodyne Interferometer
Zhao Yang,Li Dacheng. Methods and Characteristics of Opto-Electrical Signal Processing of Laser Heterodyne Interferometer[J]. Metrology & Measurement Technology, 1996, 0(6): 7-9
Authors:Zhao Yang  Li Dacheng
Affiliation:Zhao Yang; Li Dacheng
Abstract:Methods and characteristics of opto- electrical signal processing of heterodyneinterferometer are described and analysised in this paper. Their applying fields are showed. At the sametime a new opto-electrical processing method is introduced. With the new method the heterodyneinterferometer can not onlu be used to measure dynamically. but also reach to a high measurementtesolution.
Keywords:Heterodyne interferoment   Phase measurement   Signal processing   Frequency demodulation
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