| 适用于低流速的恒温式液体流量传感器 |
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| 引用本文： | 黄金彪.适用于低流速的恒温式液体流量传感器[J].传感器与微系统,1993(3):34-36. |
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| 作者姓名： | 黄金彪 |
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| 作者单位： | 东南大学 |
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| 摘 要： | 给出一种能在低流速范围有较高灵敏度的液体流量传感器。在测量水的情形下,当流速为1cm/s时传感器的输出可达30mV,该灵敏度比类似条件下氮气敏感的灵敏度高约一个数量级。该传感器利用维持芯片温度恒定所需的加热功率的变化作为流速的量度。它由标准的铝栅CMOS工艺制成。
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| 关 键 词： | 高灵敏度 液体流量传感器 低流速 |
A Constant -temperature Liquid Flow Sensor for Low Velocity |
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| Huang Jinbiao.A Constant -temperature Liquid Flow Sensor for Low Velocity[J].Transducer and Microsystem Technology,1993(3):34-36. |
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| Authors: | Huang Jinbiao |
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| Affiliation: | Southeast University |
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| Abstract: | A liquid flow sensor with high sensitivity at low velocity range is given. In the case of water, the output can reach 30mV at the flow velocity of 1cm/s. The sensitivity is higher about 1 order than that of Nitrogen gas at the similar conditions. The sensor measures the flow velocity by the change of heat power which keep the chip at constant temperature. The sensor is fabricated with standard CMOS aluminium grid technique. |
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| Keywords: | High sensitivity Liquid flow sensor Low velocity |
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