| 用激光等离子体气相沉积法制备类金刚石薄膜及光学性质研究 |
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| 引用本文： | 马玉蓉,张胜.用激光等离子体气相沉积法制备类金刚石薄膜及光学性质研究[J].量子电子学报,1993(3). |
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| 作者姓名： | 马玉蓉 张胜 |
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| 作者单位： | 中国科学技术大学物理系，中国科学技术大学物理系 合肥，230023，合肥，230023 |
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| 摘 要： | 用高功率Nd~(3+):YAG脉冲激光轰击石墨靶,成功地制备出无氢的类金刚石碳膜(DLC)。用吸收光谱分析法研究了不同制备条件下样品的光学带隙。发现在衬底温度不变时,样品的光学带隙随生长室内靶衬之间的加速电压而变化,公700～1000 V的加速电压下制备的薄膜具有较大的光学带隙。
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| 关 键 词： | YAG激光 激光等离子体气相沉积法 类金刚石薄膜 |
Preparation and Optical Properties of Diamond--Like Films Prepared by Laser Plasma Vapor Deposition |
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| Ma Yurong,Zhang Sheng.Preparation and Optical Properties of Diamond--Like Films Prepared by Laser Plasma Vapor Deposition[J].Chinese Journal of Quantum Electronics,1993(3). |
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| Authors: | Ma Yurong Zhang Sheng |
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| Affiliation: | Ma Yurong,Zhang Sheng Department of Physics,University of Seience and Technology of China,Hefei,230026 |
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| Abstract: | Uising a high power pulse VAG laser. impinging on a graphite target, diamond-like carbon films containing no hydrogen were successfully prepared.The opticalgap of the samples was measured by means of optical absorption spectroscopy.It was found that the optical gap of the films varied with the accelerating voltsbetween the target and the substrate under the condition of keeping the subs-trate temperature constant, and that the optical gap of the films prepared at theaccelerating volts between 700-1000V had larger value. |
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| Keywords: | YAG laser laser plasma vapor deposition diamond-like film |
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