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真空微电子学中的场致发射阴极制备
引用本文:秦明 黄庆安. 真空微电子学中的场致发射阴极制备[J]. 电子器件, 1993, 16(1): 39-43
作者姓名:秦明 黄庆安
摘    要:近年来,随着微机械加工技术的不断发展,人们对小功率的场致发射阴极的研究日趋活跃,本文介绍了近年来国内外对场致发射阴极的制备,电学特性及应用方面的研究进展情况,并说明该技术的发展必将取得更广泛的应用.

关 键 词:真空微电子学 场致发射阴极 制备

Fabrkation of Field Emission Cathodes of Vacuum Microele ctronics
Qin Ming Hu and Qing an Zhang Hui Zhen. Fabrkation of Field Emission Cathodes of Vacuum Microele ctronics[J]. Journal of Electron Devices, 1993, 16(1): 39-43
Authors:Qin Ming Hu and Qing an Zhang Hui Zhen
Affiliation:Qin Ming Hu and Qing an Zhang Hui Zhen
Abstract:In recent years, with the continaous development of micromachining fabrication, it becomes more and more active that small power field emission cathodes are being studied. In this paper, the fabrication, electrical characteristic and applications of FEC are introduced both in the world and in China. It showcs that the field emission cathodes will find wide applications.
Keywords:Field emissicon cathod   Micromachining fabrication   Vacuum microelectronics.
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