电子倍增CCD性能参数测试方法研究

电子倍增CCD（EMCCD）性能参数测试是电子倍增CCD芯片及其成像系统研制的重要辅助手段和设计依据。在对 EMCCD的工作原理进行了阐述之后，介绍了 EMCCD 的各项特性参数，分析了相关参数的测试方法。针对测试过程中出现的单位转换问题，引入了转换增益的概念，提出了基于改进的光子转移技术的EMCCD性能参数的测试方法，建立了EMCCD性能参数测试系统，该系统包括高稳定度可控标准钨灯、光学系统、暗箱、数据采集与处理系统等。对Andor Luca相机的转换增益、满阱容量、倍增增益、读出噪声、时钟诱导噪声和暗电流进行了测试。实验结果表明:测试值与相机的指标值基本一致，测试结果准确，证明了所提出的测试方法有效可靠。

Performance parameters test of electron multiplying CCD

The performance test of Electron multiplying CCD(EMCCD) is an important adjunct and design basis of electron multiplying CCD chip and the whole imaging system. In this paper, the working principles of EMCCD were introduced, and then the characteristic parameters of EMCCD was presented. Aiming at the problem of unit conversion in the process of testing, the concept of conversion gain was introduced.The parameters test of the electron multiplying CCD was proposed based on improved photon transfer technology, the EMCCD performance parameter testing system also was established. The system included a high stability and controllable standard tungsten lamp, optical system, the black box, data acquisition and processing system.These parameters were tested, such as convert gain, full well, multiplication gain,noise factor, readout noise, dark current noise and clock induced charge noise of Andor Luca camera.The experimental results are really good and agree with the device specifications .These also verify the feasibility and reliability of the test method.