ICF终端光学元件损伤在线检测装置的研究

终端光学元件是惯性约束聚变（ICF）系统最重要的组成部分之一。文中针对ICF系统中终端光学元件损伤的高精度、高效率检测问题，对光学元件损伤在线检测技术进行了研究，以神光-Ⅲ原型装置终端光学元件为检测对象设计了光学元件损伤在线检测系统。针对终端光学元件的排布特点及其检测要求，利用CODEV软件设计了高分辨率变焦距望远光学系统；根据终端光学元件在靶室中的分布位置，设计了相应的对准及定位系统，实现了对球体空间排布的大尺寸光学元件组的远距离、高精度、实时快速检测。模拟ICF靶场环境进行了离线仿真实验，实验表明:系统的MTF曲线在68 lp/mm大于0.4，80%能量分布在22像元内。在1.8~2.8 m的工作距离下，检测装置对300 mm300 mm视场范围内60 m以上的损伤点可以通过图像处理方法进行分辨，160 m以上的损伤点可以进行精确测量；姿态调整系统各运动环节运行精度均优于13 arc sec，满足检测要求。

Final optics damage online inspection system for ICF

Final optics play an important role in Inertial Confinement Fusion (ICF) system. In this paper, the online inspection technology for final optics damage was studied in order to build a final optics damage online inspection system for ShenGuang-Ⅲ(SG-Ⅲ) prototype device. According to the assignment of final optics in optical module, a zoom telescope optical system with high resolution was designed by CODEV to meet the testing requirement. Based on the assignment of optical modules in target chamber, the positioning mechanism was designed to focus and switch the beamlines and the optics accurately and rapidly. At last, an off-line simulation experiment based on SG-Ⅲ was carried out. The result shows that the MTF at the spatial frequency of 68 lp/mm is greater than 0.4, 80% of the energy is distributed within 22 CCD cells. Between 1.8 m to 2.8 m, the resolution of the optical detecting mechanism can reach 160 m. The defects can be tracked when their diameter is up to 60 m by image processing method. The precision of the positioning mechanism is better than 13 arc sec.