MOPA结构准分子激光电源的高精度电压控制研究

为了减小激光器双腔放电时间的相对抖动、稳定激光器输出能量,采用闭环控制回路电压泄放方法,设计了一套主振荡功率放大结构准分子激光谐振充电高精度电压控制方案。通过对电容电压取样处理,动态监测储能电容电压,当电容电压大于目标电压时,由泄放电路泄放电压至目标值,得到高精度的充电电压,使用此电压控制方案后,充电电压的波动由1.67减小到0.83。结果表明,该方案很好地提高了谐振电源储能电容上的电压精度,减小了激光器双腔放电时间的相对抖动,并为后期的激光器能量输出稳定控制打下良好基础。

High precision voltage control for MOPA excimer laser

To reduce fluctuation of discharging time of both the cavity in a master oscillator power amplifier(MOPA)excimer laser and obtain stable laser output energy, a high precision voltage control scheme was designed based on a closed loop controlling circuit. i.e., monitoring the voltage across the energy storage capacitor, when the capacitor voltage is larger than the objective voltage, the voltage discharging circuit discharges capacitance voltage to the objective voltage for getting a precision charging voltage. The results show that the fluctuation of charging voltage was reduced from 1.67 to 0.83 by using the voltage control scheme. The precision of the voltage across the energy-storage capacitor in a resonance power supply can be improved; the relative jitter of the discharge time for both the laser cavities can be reduced by means of this method. It lays a good foundation for stable laser energy output.