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基于LM算法的接触式轮廓扫描系统参数标定
引用本文:高彤,陈鸿,王晋祺,李建鑫,柴世豪.基于LM算法的接触式轮廓扫描系统参数标定[J].电子测量技术,2021,44(1):65-69.
作者姓名:高彤  陈鸿  王晋祺  李建鑫  柴世豪
作者单位:中北大学电子测试技术国家重点实验室仪器科学与动态测试教育部重点实验室 太原030051;上海无线电设备研究所 上海201109
基金项目:山西省重点研发计划(201903D121060,201903D121118)项目资助。
摘    要:为了解决接触式轮廓扫描仪由于部件安装不精确而对测量数据结果造成偏差的问题,分析了误差的主要来源,运用最小二乘法的思想,以残差平方和最小为优化目标建立系统的误差处理模型,提出并建立一套基于LM算法迭代求出系统参数的现场标定方法,并使用MATLAB软件编程验证了算法可行性且对算法进行了鲁棒性实验,仿真实验数据表明该算法可实...

关 键 词:参数标定  非线性最小二乘法  迭代  LM算法  鲁棒性

Parameter calibration of contact contour scan system based on LM algorithm
Gao Tong,Chen Hong,Wang Jinqi,Li Jianxin,Chai Shihao.Parameter calibration of contact contour scan system based on LM algorithm[J].Electronic Measurement Technology,2021,44(1):65-69.
Authors:Gao Tong  Chen Hong  Wang Jinqi  Li Jianxin  Chai Shihao
Affiliation:(State Key Laboratory of Electronic Test Technology,Key Laboratory of Instrument Science and Dynamic Measurement of Ministry of Exlucation,North University of China,Taiyuan 030051,China;Shanghai Radio Equipment Research Institute,Shanghai 201109,China)
Abstract:In order to solve the contact profile scanner due to defective components are installed and the problem that the deviation caused by the result of the measurement data, this paper analyzes the main source of error, based on the idea of least square method, the minimum residual sum of squares as the optimization target processing error of the system model is established, and establish a set of based on LM algorithm iteration the field calibration method of system parameter, and using MATLAB software programming algorithm is verified the feasibility and robustness of algorithm in experiments, simulation experiments data shows that the algorithm can realize accurate calibration of system parameters and coordinates of correction, fast convergence rate, High accuracy can control the measurement error below 0.05 mm, Angle error control below 0.1°, greatly reducing the scanner′s manufacturing and installation accuracy requirements.
Keywords:parameter calibration  nonlinear least square method  iteration  LM algorithm  robustness
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