集成式微操作器的研制

微操作器是微操作机器人的关键部件，本文基于压电扫描器的工作原理，研制出 压电陶瓷管驱动的三自由度微操作器，通过对四分压电陶瓷管的变形进行静力学分析，建立 了微操作器微位移量与驱动电压的关系模型．研制出微位移检测电路，实现了微操作器机构 、驱动、检测的集成化，设计了微位移闭环控制实验系统，对微操作器进行了静态、动态测 试，得到了微操作器的主要性能指标.实验表明，所研制的微操作器能够满足微纳米定位精 度的微操作需要．

DEVELOPMENT OF INTEGRATED MICROMANIPULATOR

A micromanipulator is one of the key components for a micromanipulating robot. Based on the principle of piezoelectric scanner, a three degree of freedom micromanipulator driven by piezoelectric tubes was developed in this paper. Thanks to static analysis of the deflection of piezoelectric tube sectioned into four quadrants, the formula establishing the relationship between microdisplacement and driving voltage was deduced. Then, the measuring circuit is developed. As a result, the integration of mechanism, actuator and sensor was realized. Meantime, a micropositioning close loop control experimental system is designed. The static and the dynamic detections were finished successfully. Some key technical parameters for the micromanipulator were given. Experiments show that the micromanipulator can be applied to some micromanipulations with micro nano meter accuracy.