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A Comparative Study of Dynamic Sheath Analytical Models of a Multispecies Plasma Immersion Ion Implantation System in Collisionless Regime |
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| Authors: | Dushyant Gupta Jyotika Jogi P.J. George |
| Affiliation: | [1]Electronics Department, University College, Kurukshetra University, Kurukshetra 136119, India [2]Department of Physics ＆ Electronics, ARSD College, University of Delhi, Delhi, India [3]KITM, Kurukshetra University, Kurukshetra, India |
| Abstract: | |
| Keywords: | Plasma immersion ion implantation dynamic sheath ion plasma frequency current density doping concentration. |
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