| 线阵CCD薄膜测宽装置关键技术 |
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| 引用本文： | 张洪涛,段发阶,胡亮,叶声华.线阵CCD薄膜测宽装置关键技术[J].哈尔滨工业大学学报,2009,41(5):110-112. |
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| 作者姓名： | 张洪涛 段发阶 胡亮 叶声华 |
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| 作者单位： | 天津大学精密测试技术及仪器国家重点实验室,天津,300072
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| 基金项目： | 国家自然科学基金资助项目，"新世纪优秀人才支持计划资助" |
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| 摘 要： | 为100%保证薄膜宽度指标,采用光学成像方法,用线阵CCD作光电接收传感器,以单片机作主控处理器,设计了可用于高精度测量薄膜宽度的装置,对薄膜宽度进行在线非接触高精度测量,经论证取得了较好的测量效果,生产现场精度优于±0.050mm,实验室精度优于±0.040mm.
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| 关 键 词： | 线阵CCD 单片机 非接触测量 |
Key technology in the device of thin film width measurement based on linear CCD |
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| ZHANG Hong-tao,DUAN Fa-jie,HU Liang,YE Sheng-hua.Key technology in the device of thin film width measurement based on linear CCD[J].Journal of Harbin Institute of Technology,2009,41(5):110-112. |
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| Authors: | ZHANG Hong-tao DUAN Fa-jie HU Liang YE Sheng-hua |
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| Affiliation: | (State Key Lab of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China) |
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| Abstract: | To completely ensure the requirement of thin film width in production field,a devise was designed and applied to the width measurement of film with high accuracy. The linear CCD was used as the photoelectric receiver sensor and SCM was used as the main control processor. On-line high-accuracy survey was carried out and good result was achieved. It is indicated that the precision is higher than ±0.050 mm in production field and which is better than ±0.040 mm in the lab environment. |
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| Keywords: | linear CCD single chip computer non-contact measurement |
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