Stress relief forms of diamond-like carbon thin films under internal compressive stress |
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Authors: | D. Nir |
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Affiliation: | Solid State Institute, Technion, Israel Institute of Technology, Haifa 32 000, Israel |
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Abstract: | An optical microscope study of the stress relief forms of diamond-like carbon thin films is presented in this paper. The dimensions of the stress relief patterns are shown to be proportional to the film thickness. Three stress relief forms are distinguished. They are analysed in the framework of the linear theory of plate buckling. The forms of the stress relief correspond to two different solutions of the differential equations. |
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