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Chemical effects in Zr- and Co-implanted sapphire
Authors:Z Werner  M Pisarek  M Barlak  R Ratajczak  W Starosta  J Piekoszewski  W Szymczyk  R Grötzschel
Affiliation:1. The Andrzej So?tan Institute for Nuclear Studies (SINS), 05-400 Otwock/?wierk, Poland;2. Institute of Physical Chemistry, PAS, Kasprzaka 44/52, 01-224 Warsaw, Poland;3. Faculty of Material Science and Engineering, Warsaw University of Technology, Wolowska 131, 02-507 Warsaw, Poland;4. Institute of Nuclear Chemistry and Technology, Dorodna 16, 03-145 Warsaw, Poland;5. Forschungszentrum Rossendorf e.V. (FZR) Institute für Ionenstrahlphysik und Materialforschung, Postfach 510119, D-01314 Dresden, Germany;1. Institute of High Pressure Physics, Sokolowska 29/37, 01-142 Warsaw, Poland;2. TopGaN Ltd, ul Soko?owska 29/37, 01-142 Warsaw, Poland;3. Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, 02-668 Warsaw, Poland;4. Faculty of Physics, University of Warsaw, Pasteura 5, 02-093 Warsaw, Poland;1. Department of Physics and The Joint Institute for Nuclear Astrophysics, University of Notre Dame, Notre Dame, IN 46556, USA;2. Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA;3. Department of Physics, Western Michigan University, Kalamazoo, MI 49008, USA;1. Institute of Physics, Vietnam Academy of Science and Technology, Vietnam;2. Center for Nuclear Study, Graduate School of Science, University of Tokyo, Japan;3. JAEA, Japan;4. Department of Physics, University of Kyushu, Japan;5. Department of Physics, University of Tohoku, Japan;6. Department of Physics, ChungAng University, Republic of Korea;7. Department of Physics, Seoul University, Republic of Korea;8. Institute of Modern Physics, Chinese Academy of Science, China;9. Research Center for Nuclear Physics, Osaka University, Japan;1. Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603950 Nizhny Novgorod, Russia;2. Max-Planck-Institut fur Mikrostrukturphysik, Weinberg 2, 06120 Halle/Saale, Germany;3. Lobachevsky State University of Nizhny Novgorod, 23 Prospekt Gagarina, 603950 Nizhny Novgorod, Russia
Abstract:Sapphire samples were implanted with Zr and Co ions to a fluence of 5 × 1017 ions/cm2 in MEVVA implanter operated at 65 kV. XPS and RBS spectra were studied in the course of annealing within the temperature range of 200–1400 °C. It is concluded that Zr diffuses to the surface and forms ZrO2 precipitates, whereas Co migrates to the bulk and forms CoAl2O4 spinel which gives the crystal a bluish color. These changes are consistent with thermodynamical properties of the implanted ions.
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