Optimization of parameters of the linear TOF-SIMS spectrometer by DOE method

Time of flight SIMS spectrometers are widely used in many industrial and scientific applications. Mass spectra of secondary ions ejected from a bombarded surface supply valuable data on its composition and give insights into physical and chemical processes at the surface. The data quality depends on several parameters, which control the spectrometer functioning. This contribution presents our work on an application of a so-called Design of Experiments (DOE) procedure to optimize working parameters of a home-assembled linear TOF-SIMS spectrometer. The efficiency of optimization procedures was tested for mass spectra of positive ions sputtered from Al surface under keV Ar ion bombardment. In particular, we show that use of the method leads to a large increase both of the mass resolution and of the signal/noise ratio (S/N), i.e. improves two quantities, which play a crucial role in mass spectrometry measurements. In addition, it is shown that DOE' method allows to reduce significantly the number of test measurements, and therefore to shorten the adjusting procedure to a minimum.