Laser-induced transformation of a-C:H thin films |
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| Authors: | A Grigonis ? Rutkunien? H Manikowski M ?ilinskas |
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| Affiliation: | 1. Kaunas University of Technology, Physics Department, Student? street 50, LT-51368, Kaunas, Lithuania;2. Poznań University of Technology, Institute of Physics, Piotrowo street 3, 60-965 Poznań, Poland;3. Institute of Micro-and Sensor Systems, Otto von Guericke University, Universitatsplatz 2, 39106 Magdeburg, Germany |
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| Abstract: | In this work, we report the laser irradiation effects on the properties of various types of amorphous hydrogenated carbon (a-C:H) films. The influence of the initial carbon film (hydrogen concentration, sp3/sp2 ratio, and sp2 clustering) is studied. The results show that a loss of hydrogen and an increase of the sp2 phase are the main processes in the laser power range between 1.8 and 5 MW/cm2. Only these processes are stronger for “more polymer-like” and “graphite-like” films than for “more diamond-like” films. |
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