Anodic porous alumina structural characteristics study based on SEM image processing and analysis |
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| Authors: | Daniel S. Raimundo Priscila B. Calíope Danilo R. Huanca Walter J. Salcedo |
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| Affiliation: | 1. Laboratório de Microeletrônica, Departamento de Engenharia Elétrica, Escola Politécnica, Universidade de São Paulo, Av. Professor Luciano Gualberto, 158 trav. 3, no. 158, São Paulo 05508-900, SP, Brazil;2. Laboratório de Sistemas Integráveis, Departamento de Engenharia Elétrica, Escola Politécnica, Universidade de São Paulo, Av. Professor Luciano Gualberto, 158 trav. 3, no. 158, São Paulo 05508-900, SP, Brazil |
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| Abstract: | The present work reports the porous alumina structures fabrication and their quantitative structural characteristics study based on mathematical morphology analysis by using the SEM images. The algorithm used in this work was implemented in 6.2 MATLAB software. Using the algorithm it was possible to obtain the distribution of maximum, minimum and average radius of the pores in porous alumina structures. Additionally, with the calculus of the area occupied by the pores, it was possible to obtain the porosity of the structures. The quantitative results could be obtained and related to the process fabrication characteristics, showing to be reliable and promising to be used to control the pores formation process. Then, this technique could provide a more accurate determination of pore sizes and pores distribution. |
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