An investigation into the effect of film thickness on nanowear with amorphous carbon-based coatings |
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| Authors: | GM Wilson JL Sullivan |
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| Affiliation: | 1. Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlá?ská 2, CZ-61137 Brno, Czech Republic;2. Nuclear Physics Institute, Academy of Sciences of the Czech Republic, v.v.i., ?e? 130, CZ-25068 ?e?, Czech Republic;3. Institute of Technical Physics and Materials Science, Centre for Energy Research, Hungarian Academy of Sciences, Konkoly Thege M. út 29-33, H-1121 Budapest, Hungary;1. Department of mechanical engineering, University of Houston, United States of America;2. Institut Pprime, UPR 3346 CNRS - Université de Poitiers – ENSMA, France;1. Micro Materials Ltd., Willow House, Yale Business Village, Ellice Way, Wrexham LL13 7YL, UK;2. Institute of Functional Surfaces, School of Mechanical Engineering, University of Leeds, Woodhouse Lane, Leeds LS2 9JT, UK;3. School of Computing and Engineering, University of Huddersfield, Queensgate, Huddersfield HD1 3DH, UK |
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| Abstract: | A sample oscillation module linked to a nanoindentation unit was used to perform nano-scale wear testing on a series of sputtered Cr doped amorphous C films deposited over a range of thicknesses (10, 20, 50, 150, and 2000 nm) under conditions relevant to MEMS and micro-scale engineering devices. A ruby sphere was used as the counter-body. Specific wear rates (defined as volume of worn material per unit applied load per unit of slid distance) were quantified and the effect of film thickness, applied load and test duration was investigated. Specific wear rate reduced exponentially with decreasing film thickness over the range of 10–2000 nm. The lowest wear rates were in the range of 0.1–6.1 × 10?17 m3 N?1 m?1. Specific wear rate reduced with increased applied load over the range of 0.1–10 mN. The data scatter of replicated testing reduced along with the reduction of wear rate. A rapid reduction of specific wear rate was observed during the first 3000 oscillation cycles. This was analogous to the ‘running in’ process observed with macroscopic tribology systems. |
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