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光电高精度全场形位检测系统的研究
引用本文:张广军,刘惠彬,等.光电高精度全场形位检测系统的研究[J].计量学报,1994,15(4):292-295.
作者姓名:张广军  刘惠彬
作者单位:北京航空航天大学
摘    要:介绍了光电高精度全场形位检测系统,该系统以面阵CCD作为被测物体边缘图象的探测器件,应用激光衍射和图象处理技术进行被测物体边缘的精确定位,实现了高精度全场形位检测,该系统具有测量速度快,检测精度高及数据处理自动化等特点。整个系统是近代光9学,光电技术与微机技术的有机结合。

关 键 词:激光衍射  CCD  光电高精度全场形位检测系统  产品零件  形位检测

A Study on the Photo-electric Measuring System for the Field of Shape and Position with High Precision
Zhang Guangjun, Liu Huibin, Luo Xianhe, Li Xingshan.A Study on the Photo-electric Measuring System for the Field of Shape and Position with High Precision[J].Acta Metrologica Sinica,1994,15(4):292-295.
Authors:Zhang Guangjun  Liu Huibin  Luo Xianhe  Li Xingshan
Abstract:The photo-electric measuring system for the field of shape and position with high precision is described in this paper. By using a plane scanning CCD and the techniques of laser diffraction and image processing, the measuring system can realize the measurement of the field of shape and position. It possesses the advantages of high precision and high efficiency, for it is a combination of modern optics, photoelectric technique and microcomputer.
Keywords:The field of shape and position  Laser  Diffraction  CCD
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