| 退火对BST薄膜光学特性影响的研究 |
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| 引用本文： | 高志强,杨传仁,陈宏伟,符春林,廖家轩,赵莉. 退火对BST薄膜光学特性影响的研究[J]. 压电与声光, 2006, 28(1): 67-68,71 |
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| 作者姓名： | 高志强 杨传仁 陈宏伟 符春林 廖家轩 赵莉 |
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| 作者单位： | 电子科技大学,微电子与固体电子学院,四川,成都,610054 |
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| 基金项目： | 重大基金资助项目(Z01) |
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| 摘 要： | 利用射频磁控溅射在硅和石英基片上制备了Ba0.6Sr0.4TiO3(BST)薄膜。并用气氛炉和快速晶化炉对其进行退火,比较了退火前后的XRD谱和光致发光光谱,结果表明,退火后,氧缺位减少,发光光谱在紫外区的峰位发生红移,在可见光区的峰位却发生蓝移,荧光峰半高宽变窄。同时,透射光谱表明,薄膜的禁带宽度变窄。
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| 关 键 词： | BST 退火处理 XRD 光谱 |
| 文章编号： | 1004-2474（2006）01-0067-02 |
| 收稿时间： | 2004-03-10 |
| 修稿时间： | 2004-03-10 |
A Study on Effects of Annealing on Optical Properties of Barium Strontium Titanate Thin Films |
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| GAO Zhi-qiang,YANG Chuan-ren,CHEN Hong-wei,FU Chun-lin,LIAO Jia-xuan,ZHAO Li. A Study on Effects of Annealing on Optical Properties of Barium Strontium Titanate Thin Films[J]. Piezoelectrics & Acoustooptics, 2006, 28(1): 67-68,71 |
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| Authors: | GAO Zhi-qiang YANG Chuan-ren CHEN Hong-wei FU Chun-lin LIAO Jia-xuan ZHAO Li |
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| Abstract: | Ba_(0.6)Sr_(0.4)TiO_3(BST) films have been deposited on silicon or quartz substrate using RF magnetron sputtering,and treated by furnace annealing and rapid thermal annealing.XRD and luminescences spectra show that after the films were annealed,the Oxygen vacancy reduced,the spectra in ultraviolet region showed red-shift and those in visible region showed blue-shift,and full width at half-maximum(FWHM) of the fluorescence peak became narrow.Meanwhile,the transmission spectra exhibited that the band-gap of the films became narrow. |
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| Keywords: | BST annealing XRD spectrum |
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