| 单悬臂梁结构的GaAs基MOEMS可调谐RCE光探测器 |
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| 引用本文： | 周震,韩勤,杜云,杨晓红,吴荣汉,黄永清,任晓敏.单悬臂梁结构的GaAs基MOEMS可调谐RCE光探测器[J].半导体学报,2005,26(6). |
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| 作者姓名： | 周震 韩勤 杜云 杨晓红 吴荣汉 黄永清 任晓敏 |
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| 作者单位： | 北京邮电大学电信工程学院,光通信中心,北京,100876;中国科学院半导体研究所,集成光电子学联合国家重点实验室,北京,100083 |
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| 基金项目： | 国家重点基础研究发展计划(973计划) |
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| 摘 要： | 成功研制了GaAs基MOEMS可调谐RCE光探测器.该器件采用单悬臂梁结构,在6V的小调谐电压下,获得了31nm的连续调谐范围.在调谐过程中,峰值量子效率最大为36.9%,最小为30.8%;FWHM最大为20nm,最小为14nm.在0V偏压下器件的暗电流密度为7.46A/m2.
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| 关 键 词： | GaAs MOEMS RCE 光探测器 调谐 单悬臂梁 |
A GaAs-Based MOEMS Tunable RCE Photodetector with Single Cantilever Beam |
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| Zhou Zhen,HAN Qin,Du Yun,Yang Xiaohong,Wu Ronghan,Huang Yongqing,REN Xiaomin.A GaAs-Based MOEMS Tunable RCE Photodetector with Single Cantilever Beam[J].Chinese Journal of Semiconductors,2005,26(6). |
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| Authors: | Zhou Zhen HAN Qin Du Yun Yang Xiaohong Wu Ronghan Huang Yongqing REN Xiaomin |
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| Abstract: | A GaAs-based micro-opto-electro-mech anical-systems(MOEMS) tunable resonant cavity enhanced(RCE)photodetector with a continuous tuning range of 31nm under a 6V tuning voltage is demonstrated. The single cantilever beam structure is adopted for this MOEMS tunable RCE photodetector. The maximum and minimum peak quantum efficiency during the tuning are 36.9 % and 30. 8 %, respectively. The maximum and minimum full-width-at-halfmaximum (FWHM) are 20nm and 14nm,respectively. The dark current density is 7.46A/m2 without bias. |
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| Keywords: | GaAs MOEMS RCE photodetector tuning single cantilever beam |
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