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音圈电机激光扫描器的线性扫描控制
引用本文:熊小刚,陈四海,吴鑫,石本义,陈巍.音圈电机激光扫描器的线性扫描控制[J].红外与激光工程,2012,41(2):375-378.
作者姓名:熊小刚  陈四海  吴鑫  石本义  陈巍
作者单位:华中科技大学光电子科学与工程学院,湖北武汉430074;武汉光电国家实验室,湖北武汉430074
基金项目:教育部新世纪优秀人才支持计划(NCET-07-0319)
摘    要:建立了音圈电机驱动的激光扫描器的模型并进行了参数辨识。由于音圈电机驱动的激光扫描器反馈回路的高频噪声较大,利用光电精密跟踪的传统方法,如改进型PID控制算法,以及理想闭环特性(最佳二阶特性)的逆向设计方法,系统并不能稳定工作,易振荡。分析了造成振荡的原因,采用前馈复合控制方法,避开了振荡因子同时又减小了稳态误差,解决了稳态误差和振荡的矛盾。结合反馈回路噪声大的特点,将滤波器加入反馈回路中,使激光扫描器不仅能稳定工作,消除了扫描时候的抖动,同时减少了线性扫描时候的磁滞现象。

关 键 词:快速反射镜  音圈电机  激光扫描器  闭环特性

Linear control of laser scanner driven by voice coil motor
Xiong Xiaogang , Chen Sihai , Wu Xin , Shi Benyi , Chen Wei.Linear control of laser scanner driven by voice coil motor[J].Infrared and Laser Engineering,2012,41(2):375-378.
Authors:Xiong Xiaogang  Chen Sihai  Wu Xin  Shi Benyi  Chen Wei
Affiliation:1,2(1.College of Optoelectronic Science and Technology,Huazhong University of Science and Technology,Wuhan 430074,China; 2.Wuhan National Laboratory for Optoelectronic,Wuhan 430074,China)
Abstract:A laser scanner driven by voice coil motor(VCM) was introduced and parameters of the established model were identified.Due to lots of high frequency optical noise in feedback loop,conventional methods,the improved PID control algorithm and the inverse design method based on optimal 2-order property of ideal closed-loop,which usually used for precise tracking of optoelectronic,cannot be employed for this laser scanner.This willl introduce unstablity and oscillates.After analyzing reasons of causing oscillation,a so-called feedforward control method based on the two methods above was used to resolve the contradiction between the oscillation and steady state error.At the same time,a low-pass filter was placed in the feedback loop according to the situation where feedback loop is filled with noise.The proposed method not only stabilizes the laser scanner but also eliminates hysteresis during linear scanning.
Keywords:fast steering mirror(FSM)  voice coil motor(VCM)  laser scanner  linear control
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