| Pt／TiO2氧敏元件工艺和氧敏机制的研究 |
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| 引用本文： | 姚奎,徐毓龙.Pt／TiO2氧敏元件工艺和氧敏机制的研究[J].西安电子科技大学学报,1993,20(2):33-38. |
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| 作者姓名： | 姚奎 徐毓龙 |
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| 作者单位： | 西安电子科技大学技术物理系，西安电子科技大学技术物理系，西安电子科技大学技术物理系 西安交通大学姚熹教授博士生 |
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| 摘 要： | 此文主要阐述了通过热分解氯铂酸工艺对TiO_2元件进行第二次铂催化能大幅度提高氧敏特性,并使元件呈现许多新特点。在总结实验的基础上,发展了肖特基势垒氧敏机制,较好地解释了实验现象。
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| 关 键 词： | 氧敏元件 肖特基势垒 二氧化钛 |
A study of the process and oxygen sensing mechanisms of Pt/TiO_2 oxygen sensors |
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| Yao Kui,Xu Yulong,Zhou Xiaohua.A study of the process and oxygen sensing mechanisms of Pt/TiO_2 oxygen sensors[J].Journal of Xidian University,1993,20(2):33-38. |
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| Authors: | Yao Kui Xu Yulong Zhou Xiaohua |
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| Affiliation: | Yao Kui;Xu Yulong;Zhou Xiaohua |
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| Abstract: | This paper primarily describes the fact that TiO_2 elements' oxygen sensing properties can be greatly improved and many new features can be added by doping platinum to the sintered el- ements by heating to decompose chloroplatinic acid solution. On the basis of experimental facts, the Schottky--barrier oxygen sensing mechanism is developed, and the experimental facts are explained satisfactorily. |
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| Keywords: | TiO_2 oxygen sensor Schottky-barrier |
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