| 一种抗大过载微型加速度计研究 |
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| 引用本文： | 曾昭君,石进杰.一种抗大过载微型加速度计研究[J].微纳电子技术,2003(Z1). |
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| 作者姓名： | 曾昭君 石进杰 |
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| 作者单位： | 北京大学微电子研究所 北京100871
(曾昭君)，北京大学微电子研究所 北京100871(石进杰) |
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| 摘 要： | 讨论了一种抗大过载 (15 0 0 0 0 g)的微型加速度计 ,主要内容包括 :阐述加速度计的工作原理 ;设计一种新型十字梁的器件结构 ,并对这种结构进行抗大过载的冲击实验 ,以验证这种新型的结构对于大过载冲击的可靠性 ;进而利用ANSYS对器件进行模态分析 ,找出结构上应变最大的位置 ,并对结构尺寸进行优化 ;提供一种可能的电路版图说明 ,并对加速度计的灵敏性进行理论分析 ;最后提供一种可行的加工工艺方法
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| 关 键 词： | 加速度计 MEMS 大过载 ANSYS |
A novel piezoresistive accelerometer with high accuracy and overload ability |
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| ZENG Zhao Jun,SHI Jin Jie.A novel piezoresistive accelerometer with high accuracy and overload ability[J].Micronanoelectronic Technology,2003(Z1). |
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| Authors: | ZENG Zhao Jun SHI Jin Jie |
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| Abstract: | Design and simulation of a novel accelerometer sensor with high accuracy and overload ability, which can undergo 150000g acceleration are presented. And its principle is explained, and a new cross structure is designed. At the same time, the impact experiment has been done, and the reliability tests have also been carried out. We also optimized its structure through modal analysis by using of ANSYS. At last, the electrical layout and processing have been developed. |
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| Keywords: | accelerometer MEMS overload ANSYS |
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