Failure mode analysis of oxide VCSELs in high humidity and high temperature

High-speed fiber-optic transceiver modules using parallel optics require that oxide-confined vertical-cavity surface-emitting lasers (VCSELs) be moisture resistant in a non-hermetic package. We have found that the conventional storage 85/85 (85/spl deg/C/85% relative humidity) test does not adequately characterize oxide VCSELs moisture resistance. We have identified three failure modes in the oxide VCSELs under operating conditions in high humidity. In this paper, we discuss the failure mechanisms including dislocation growth, semiconductor cracks, and aperture surface degradation, all associated with operation under high relative humidity. Understanding of these failure modes has led to more appropriate qualification standards and environmentally robust oxide VCSELs.