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Friction force microscopy study of annealed diamond-like carbon film
Authors:Won Seok Choi  Yeun-Ho Joung  Jinhee Heo  Byungyou Hong
Affiliation:1. School of Electrical Engineering, Hanbat National University, Daejeon 305-719, Republic of Korea;2. Materials Safety Evaluation Group, Korea Institute of Materials Science, Changwon 641-831, Republic of Korea;3. School of Information and Communication Engineering, Sungkyunkwan University, Suwon 440-746, Republic of Korea;1. MOE Key Laboratory of Enhance Heat Transfer & Energy Conservation, South China University of Technology, Guangzhou 510640, China;2. The Key Laboratory of Fuel Cell Technology of Guangdong Province, South China University of Technology, Guangzhou 510640, China;1. School of Chemistry and Chemical Engineering, Beijing Institute of Technology, Liangxiang East Road, Beijing 102488, China;2. Analysis and Testing Center, Beijing Institute of Technology, Liangxiang East Road, Beijing 102488, China;3. Analysis Center, Tsinghua University, Beijing 100084, China;1. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou, PR China;2. University of Chinese Academy of Sciences, Beijing, PR China;3. College of Life-science and Chemistry,Tianshui Normal University, Tianshui, PR China;1. Center for Advanced Plasma Surface Technology, NU-SKKU Joint Institute for Plasma-Nano Materials, School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, 440-746, South Korea;2. Biological & Nanoscale Materials Lab, Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, 440-746, South Korea;3. Plasma Nanotechnology Research Center, Nagoya University, Furo-cho, Chikusa-ku, 4648603, Japan
Abstract:In this paper we introduce mechanical and structural characteristics of diamond-like carbon (DLC) films which were prepared on silicon substrates by radio frequency (RF) plasma enhanced chemical vapor deposition (PECVD) method using methane (CH4) and hydrogen (H2) gas. The films were annealed at various temperatures ranging from 300 to 900 °C in steps of 200 °C using rapid thermal processor (RTP) in nitrogen ambient. Tribological properties of the DLC films were investigated by atomic force microscopy (AFM) in friction force microscopy (FFM) mode. The structural properties of the films were obtained by high resolution transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS). The wettability of the films was obtained using contact angle measurement. XPS analysis showed that the sp3 content is decreased from 75.2% to 24.1% while the sp2 content is increased from 24.8% to 75.9% when the temperature is changed from 300 to 900 °C. The contact angles of DLC films were higher than 70°. The FFM measurement results show that the highest friction coefficient value was achieved at 900 °C annealing temperature.
Keywords:
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