Tribological properties of metal doped a-C film by RF magnetron sputtering method |
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| Authors: | Yong Seob Park Tae-Hwan Jung Dong-Gun Lim Young Park Hyungchul Kim Won Seok Choi |
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| Affiliation: | 1. Department of Photoelectronics Information, Chosun College of Science and Technology, Gwangju 501-744, Republic of Korea;2. Department of Electronic Engineering, Chungju National University, Chungju 380-702, Republic of Korea;3. Korea Railroad Research Institute, Uiwang 437-757, Republic of Korea;4. Department of Electrical Engineering, Hanbat National University, Daejeon 305-719, Republic of Korea;1. SEMATECH, 257 Fuller Rd Suite 2200, Albany, NY 12203, United States;2. College of Nanoscale Science and Engineering, SUNY Polytechnic Institute, 251 Fuller Road, Albany, NY 12203, United States;3. AIXTRON Inc., 1139 Karlstad Dr, Sunnyvale, CA 94089, United States;4. Micron Technologies, 8000 S Federal Way, Boise, ID 83716, United States;1. Université de Carthage, Laboratoire de Chimie des Matériaux, Faculté des Sciences de Bizerte, 7021 Jarzouna, Tunisia;2. CFisUC, Department of Physics, University of Coimbra, P-3004-516 Coimbra, Portugal;3. Laboratoire de Chimie Organométallique de Surface (LCOMS), Ecole Supérieure de Chimie Physique Electronique, 69626 Villeurbanne Cedex, France |
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| Abstract: | We deposited various metal doped amorphous carbon (a-C:Me) films by radio frequency (RF) magnetron co-sputtering method. Tungsten (W), molybdenum (Mo), and chromium (Cr) were used as the doping metals in a-C film. The applied power on carbon and metal (W, Mo, and Cr) target were 150 W and 40 W, respectively. a-C:Me films exhibited smooth and uniform surface roughness and the hardness over 15 GPa. Specially, a-C:W film showed the maximum hardness of 18.5 GPa. The coefficient of friction of a-C:W film is relatively lower than that of other films and the critical load value of a-C:W film is higher. These results are related to the concentration of metal in the carbon matrix by the difference of sputtering yield and the change of the structure by the metal bonding. Consequently, W metal is good candidate as the doping metal for the improvement of tribological characteristics. |
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