Surface and crystalline analysis of aluminum oxide single crystal treated by quasistationary compression plasma flow |
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| Authors: | S. Maletic D.M. Popovic V. Cubrovic A.A. Zekic J. Dojcilovic |
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| Affiliation: | 1. University of Belgrade, Faculty of Physics, Studentski trg 12, Belgrade, Serbia;2. University of Belgrade, Department of Textile Engineering, Faculty of Technology and Metallurgy, Karnegijeva 4, 11000 Belgrade, Serbia;3. The College of Textile Design, Technology and Management, Starine Novaka 24, Belgrade, Serbia;1. Faculty of Technology and Metallurgy, University of Belgrade, Karnegijeva 4, Belgrade 11000, Serbia;2. Faculty of Physics, University of Belgrade, Studentski Trg 12, Belgrade 11000, Serbia;1. Centre for Materials and Surface Science, Department of Physics, La Trobe University, Victoria 3086, Australia;2. Environmental Geoscience, Department of Agricultural Sciences, La Trobe University, Victoria 3086, Australia;1. School of Resources and Environmental Engineering, Wuhan University of Technology, Wuhan, 430070, China;2. School of Mineral Processing and Bioengineering, Central South University, Changsha, 410083, China;3. Hubei Key Laboratory of Mineral Resources Processing and Environment, Wuhan University of Technology, Luoshi Road 122, Wuhan, Hubei, 430070, China;4. School of Xingfa Mining Engineering, Wuhan Institute of Technology, Wuhan, 430073, China;1. Plant Ecology and Environmental Science Division, CSIR-National Botanical Research Institute, Lucknow 226001, India;2. Department of Botany, Banaras Hindu University, Varanasi 221005, India |
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| Abstract: | Material such as aluminum oxide (Al2O3) is important in electronics industry. On the other hand, plasma is one of the most efficient and sophisticated tools for materials processing. In this work a treatment of Al2O3 (0001) surface by quasistationary compression plasma flow (CPF) is analyzed in detail. Offline metrology was performed using dielectric measurements, X-ray diffraction (XRD), scanning electron microscopy (SEM) equipped with energy-dispersive X-ray spectroscopy (EDX) and atomic force microscopy (AFM). Oriented low-dimensional periodic structures are occurred for the plasma treated Al2O3 single crystal. In the paper is reported that these oriented ripple-shaped structures contain a higher percentage of oxygen than the surrounding crystal surface. This could be the framework for usage of CPF as a tool in manufacturing of surfaces containing the highly organized oxygen-rich structures. |
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