Effects of temperature on ZnO hybrids grown by metal-organic chemical vapor deposition |
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Authors: | A-Young Kim Samseok Jang Do Han Lee So young Yim Dongjin Byun |
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Affiliation: | 1. Material Science and Engineering, The University of Texas at Dallas, Richardson 75083, TX, USA;2. CINVESTAV-Querétaro, Libramiento Norponiente #2000, Querétaro 76230, Qro, Mexico;3. CIMAV-Monterrey, Alianza Norte 202, Parque de Investigación e Innovación Tecnológica, Apodaca 66628, N. L., Mexico |
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Abstract: | The growth of three-dimensional ZnO hybrid structures by metal-organic chemical vapor deposition was controlled through their growth pressure and temperature. Vertically aligned ZnO nanorods were grown on c-plane of sapphire substrate at 600 °C and 400 Torr. ZnO film was then formed in situ on the ZnO nanorods at 100, 600, and 700 °C and 10 Torr. High-resolution X-ray diffraction measurements showed that the ZnO film on the nanorods/sapphire grew epitaxially, and that the ZnO film/nanorods hybrid structures had well-ordered wurtzite structures. The hybrid ZnO structure was shown to be about 3–5 μm by field-emission scanning electron microscopy. The hybrid formed at 600 °C showed better crystalline quality those formed at 100 °C or 700 °C. These structures have potential applicability as nanobuilding blocks in nanodevices. |
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