pH sensing reliability of flexible ITO/PET electrodes on EGFETs prepared by a roll-to-roll process |
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Authors: | Cheng-En Lue I-Shun Wang Chi-Hsien Huang Yu-Ting Shiao Hau-Cheng Wang Chia-Ming Yang Shu-Hao Hsu Ching-Yu Chang William Wang Chao-Sung Lai |
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Affiliation: | 1. Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan 333, Taiwan;2. Institute of Electro-Optical Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan 333, Taiwan;3. Win Optical Technology CO. LTD., 5F.-11, No. 40-2, Sec. 1, Minsheng N. Road, Kwei-Shan, Tao-Yuan 333, Taiwan;4. Crystalvue Medical Corporation, No. 7, Xingye Street, Kwei-Shan, Tao-Yuan 333, Taiwan;5. Biosensor Group, Biomedical Engineering Research Center, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan 333, Taiwan |
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Abstract: | In this work, indium tin oxide (ITO) layers were deposited by radio frequency sputtering using a roll-to-roll process on flexible polyethylene terephthalate substrates as pH-sensing electrodes of extended gate field effect transistors (EGFETs). When the pH sensitivity of EGFETs for ITO layers with different sheet resistances was compared, a higher sensitivity was found for samples with a lower sheet resistance (100 Ω/□), and a reliability evaluation was carried out for this condition. The average sensitivity was 50.1 mV/pH, as measured from pH 2 to pH 12. Over three additional runs, the standard variation of the average sensitivity was found to be ±1.7 mV/pH. The tolerance to light is high; the samples were measured in dark and light conditions, and a difference of only 0.6 mV was observed. The temperatures available for measurement are 25–40 °C. Up to this point, the behavior of samples stored in dry conditions has been found to persist for more than 55 days. |
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