Analysis of reliability and optimization of ESD protection devices supported by modeling and simulation

An analysis of electrostatic discharge (ESD) protection structures supported by advanced 2-D mixed mode electro-thermal device and circuit simulation with calibrated electro-physical models to increase the reliability of protected IC’s is presented. The critical temperature as a criterion of device destruction is defined and experimentally verified. Numerical simulation and visualization of the internal electro-physical properties of the analyzed structures during a very short ESD pulse considerably improved the understanding of their physical behavior and contributes to a proper design and optimization of doping and geometry of the analyzed ESD protection devices. The analyzed devices are designed as protection against Human Body Model (HBM) and International Electromechanical Commission model (IEC) 61000-4-2 with very high robustness. The obtained results are shown on two examples. Modification of the device layout by splitting the cathode contact of the ESD diode into two parts allowing area reduction with improved electrical characteristics is the subject of the first example. The influence of doping fluctuations on the device robustness is presented in the second example. Different triggering and failure mechanisms of the diode and transistor structure during HBM and IEC pulse are presented.