| 工艺公差对阵列波导光栅波分复用器性能的影响 |
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| 引用本文： | 秦政坤,马春生,李德禄,张海明,张大明,刘式墉. 工艺公差对阵列波导光栅波分复用器性能的影响[J]. 半导体学报, 2006, 27(5): 926-931 |
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| 作者姓名： | 秦政坤 马春生 李德禄 张海明 张大明 刘式墉 |
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| 作者单位： | 吉林大学电子科学与工程学院 集成光电子学国家重点联合实验室，长春 130012;吉林师范大学，四平 136000;吉林大学电子科学与工程学院 集成光电子学国家重点联合实验室，长春 130012;吉林大学电子科学与工程学院 集成光电子学国家重点联合实验室，长春 130012;吉林大学电子科学与工程学院 集成光电子学国家重点联合实验室，长春 130012;吉林大学电子科学与工程学院 集成光电子学国家重点联合实验室，长春 130012;吉林大学电子科学与工程学院 集成光电子学国家重点联合实验室，长春 130012 |
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| 摘 要： | 依据阵列波导光栅(AWG)的传输理论,分析了工艺公差对硅基聚合物AWG波分复用器性能的影响.分析结果表明,工艺公差将引起AWG传输光谱的漂移,并使串扰增大.为了实现AWG器件正常的解复用功能,我们对AWG工艺公差的累积和补偿效应进行了讨论.
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| 关 键 词： | 阵列波导光栅 波分复用器 工艺公差 传输光谱 串扰 工艺公差 阵列波导光栅 波分 复用器 性能 影响 Multiplexers Arrayed Waveguide Grating Characteristics Manufacturing 补偿效应 功能 解复用 器件 串扰 漂移 传输光谱 结果 基聚合物 分析 |
| 文章编号： | 0253-4177(2006)05-0926-06 |
| 收稿时间： | 2006-01-04 |
| 修稿时间： | 2006-02-16 |
Effect of Manufacturing Tolerances on Characteristics ofArrayed Waveguide Grating Multiplexers |
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| Qin Zhengkun,Ma Chunsheng,Li Delu,Zhang Haiming,Zhang Daming and Liu Shiyong. Effect of Manufacturing Tolerances on Characteristics ofArrayed Waveguide Grating Multiplexers[J]. Chinese Journal of Semiconductors, 2006, 27(5): 926-931 |
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| Authors: | Qin Zhengkun Ma Chunsheng Li Delu Zhang Haiming Zhang Daming Liu Shiyong |
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| Affiliation: | College of Electronic Science and Engineering, State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130012,China;Jilin Normal University, Siping 136000,China;College of Electronic Science and Engineering, State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130012,China;College of Electronic Science and Engineering, State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130012,China;College of Electronic Science and Engineering, State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130012,China;College of Electronic Science and Engineering, State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130012,China;College of Electronic Science and Engineering, State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130012,China |
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| Abstract: | The effects of manufacturing tolerances on transmission characteristics are analyzed for a 33×33 polymer arrayed waveguide grating (AWG) multiplexer via transmission theory. Simulated results show that manufacturing tolerances result in a shift of the transmission spectrum and in the increase of the crosstalk compared with theoretical device. The accumulation and compensation of manufacturing tolerances are investigated. In order to realize the normal demultiplexing for a fabricated AWG device, some allowed manufacturing tolerances are discussed. |
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| Keywords: | arrayed waveguide grating multiplexer manufacturing tolerance transmission spectrum crosstalk |
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