现场真空漏孔校准装置的设计

为了减小现场环境与校准环境的差异对真空漏孔校准的影响，通过理论研究，设计了现场真空漏孔校准装置，可实现对真空漏孔的现场校准。考虑到现场真空漏孔校准装置需便于携带及搬运，装置的设计采用了分体式结构。现场真空漏孔校准装置由抽气系统、校准室系统、真空漏孔连接系统、流量输出系统、充气系统、定容室与压力测量系统及烘烤系统等7个部分组成，复合了定容法及固定流导法两种校准方法，预计真空漏孔校准范围为5＆#215;10-10～5＆#215;10-5 Pa？m3/s，合成标准不确定度为10％。

DESIGN OF VACUUM LEAK CALIBRATION APPARATUE IN SITE

In order to reduce the influence of the discrepancy between in site and calibration environment on the cali-brated results,a vacuum leak calibration apparatus,which can be used to calibrate vacuum leak in site,was designed with the help of theoretical calculation.The modularization and split architecture was utilized in designing the apparatus in order to take-down and transportation easily. The calibration apparatus consists of pumping system,flow calibration system,vac-uum leak joint system,output system,charge gas system,constant-volume and pressure measurement system,and bake system together,and this apparatus can adopt two methods such as constant-volume method and constant conductance method to calibrate vacuum leak. The expected calibration range of the apparatus in operational site is 5＆#215;10-10~5＆#215;10-5 Pa？m3/s with a combined standard uncertainty less than 10%.