| 亚微米电子束曝光机自动输片系统结构与精度分析 |
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| 引用本文： | 王继红. 亚微米电子束曝光机自动输片系统结构与精度分析[J]. 光电工程, 1998, 25(3): 49-51,55 |
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| 作者姓名： | 王继红 |
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| 作者单位： | 中国科学院光电技术研究所 |
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| 摘 要： | 着重描述了自动输片系统完成的各项功能，并详细介绍机械手的设计功能及精度分析。
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| 关 键 词： | 电子束曝光机 输片机构 机械手 精度分析 |
Constitution and Accuracy Analysis of Automatic Wafer Transporting System for Sub Micron E Beam Exposure Machine |
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| Wang Jihong. Constitution and Accuracy Analysis of Automatic Wafer Transporting System for Sub Micron E Beam Exposure Machine[J]. Opto-Electronic Engineering, 1998, 25(3): 49-51,55 |
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| Authors: | Wang Jihong |
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| Abstract: | Various functions performed by the automatic wafer transporting system are described in particular in the paper.The designed functions and accuracy analysis of the manipulator are introduced in detail. |
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| Keywords: | Electron beam exposure devices Wafer Transport mechanisms Manipulators Accuracy analysis. |
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