On the elastic constants of amorphous carbon nitride |
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| Authors: | A Champi AS Ferlauto F Alvarez SRP Silva FC Marques |
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| Affiliation: | 1. Universidade de São Paulo, USP, Instituto de Fisica, 05508-090, SP, Brazil;2. Universidade Estadual de Campinas, Unicamp, Instituto de Física “Gleb Wataghin”, 13083-970, Campinas–SP, Brazil;3. School of Electronics and Physical Sciences, University of Surrey, Guildford, GU2 7XH United Kingdom |
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| Abstract: | Elastic and thermomechanical properties of amorphous carbon nitrite thin films as a function of nitrogen concentration are reported. The films were prepared by ion beam assisted deposition with nitrogen concentrations ranging from 0 to 33 at.%. By using a combination of the thermally induced bending technique and nano-indentation measurements it was possible to calculate independent values for the Young's modulus, the Poisson's ratio, as well as the thermal expansion coefficient of the films. The hardness and elastic recovery are discussed in terms of the Young's modulus and the Poisson's ratio. |
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