Surface acoustic wave properties of natural smooth ultra-nanocrystalline diamond characterized by laser-induced SAW pulse technique |
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| Authors: | Y.C. Lee S.J. Lin V. Buck R. Kunze H. Schmidt C.Y. Lin W.L. Fang I.N. Lin |
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| Affiliation: | 1. Department of Materials Science & Engineering, National Tsing-Hua University, Hsin-Chu, 300, Taiwan, ROC;2. Department of Technical Physics, Duisburg Essen University, Germany;3. Institute for Solid State Research, IFW Dresden, Germany;4. Department of Power Mechanical Engineering, National Tsing-Hua University, 300, Taiwan, ROC.;5. Department of Physics, Tamkang University; 151 Yin-Chuan Rd. Tamsui, Taipei, 251, Taiwan, ROC |
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| Abstract: | Diamond is one of the best SAW substrate candidates due to its highest sound velocity and thermal conductivity. But conventional diamond films usually express facet structure with large roughness. Ultra-nanocrystallined diamond (UNCD) films grown in a 2.45 GHz IPLAS microwave plasma enhanced chemical vapor deposition (MPECVD) system on Si (100) substrates in CH4-Ar plasma possess naturally smooth surface and are advantageous for device applications. Moreover, highly C-axis textured aluminum nitride (AlN) films can be grown by DC-sputtering directly on UNCD coated Si substrate. However, properties of UNCD films are much complex than microcrystalline diamond films, that is because this is a very complex material system with large but not fixed portion of grain boundaries and sp2/sp3 bonding. Properties of UNCD films could change dramatically with similar deposition condition and with similar morphologies. A simple and quick method to characterize the properties of these UNCD films is important and valuable. Laser-induced SAW pulse method, which is a fast and accurate SAW properties measuring system, for the investigation of mechanical and structure properties of thin films without any patterning or piezoelectric layer. |
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