Piezo-actuated nanodiamond cantilever technology for high-speed applications |
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| Authors: | J. Kusterer A. Lüker P. Herfurth Y. Men W. Ebert P. Kirby M. O'Keefe E. Kohn |
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| Affiliation: | 1. Institute for Electron Devices and Circuits, University of Ulm, Germany;2. School of Industrial & Manufacturing Science (SIMS), Cranfield University, United Kingdom;3. Filtronic Compound Semiconductors Ltd., United Kingdom |
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| Abstract: | Diamond cantilever actuators show high resonance frequencies but need also high actuation forces, pointing towards piezoelectric actuation by a PZT/diamond unimorph. In this study lead zirconate titanate (Pb(Zr,Ti)O3, PZT) layers have been deposited onto nanocrystalline diamond films by sol–gel deposition, to realize high-speed MEMS actuators. The fabrication technology is based on self-aligned patterning and on optical lithography. A mechanical resonance frequency of 3.9 MHz has been obtained for 30 µm cantilever length dominated by the nanodiamond Young's modulus of approximately 1000 GPa. |
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