An evaluation of three simple scalable MIM capacitor models

This paper presents an evaluation of three different scalable metal-insulator-metal capacitor models for use in monolithic-microwave integrated-circuit design. The models, including one previously unpublished, are based on transmission-line theory and are easily scalable using only physical dimensions and constants. Comparisons to measured data for several device sizes, up to 45/spl deg/ in electrical length, show that the three models exhibit similar performance, with a mean deviation between models and S/sub 11/ measurements that is less than 3%.