Development of a new meso-scale machine tool for fabricating micro V-grooves

This work presents the development of a meso-scale machine tool with a nanometer resolution. The newly developed meso-scale machine tool consists of a pagoda structure for Z-axis, four HR8 ultrasonic motors, three linear encoders with a resolution of 2 nm, a coaxial counter-balance system, a XY coplanar positioning stage, a rotary stage, a Galil 4-axis motion control card, an industrial PC and a CCD camera system. The optimal geometrical dimensions of the pagoda structure have been determined by ANSYS software. The designed meso-scale machine tool is equipped with an X–Y coplanar positioning stage with nanometer resolution. The coplanar stage developed by National Taiwan University was integrated with two linear encoders, so that a two-axis closed-loop control was possible. A circular positioning test with the radius of 1 mm using the developed stage was tested, and the overall circular positioning error was about 83 nm based on the test results. The micro V-grooves and the micro pyramid cutting tests of the polished oxygen free copper using a single crystal diamond tool on the developed meso-scale machine tool have been performed. The cutting tests under various combination of the depth of cut and cutting speed have been carried out. It revealed that the cutting speed had no great influence on the cutting force. The measured cutting forces for the depth of cut of 5, 10, 15 μm were 1.2, 1.6 and 2.4 N, respectively. The results showed the meso-scale machining tool can be used in micro pyramid structures manufacturing.