二维平动位移传感器的设计与标定

针对物体做平面运动时的二维位移测量问题,设计了一种变面积式电感二维位移传感器.分析了传感器的工作原理,设计了传感器的具体结构,在相互垂直的两个方向上分别放置U形铁芯和线圈,当衔铁在铁芯上方做平面运动时,线圈的电感发生变化,通过测量电路转换成与位移成正比的电信号.对传感器进行了标定试验,得到了传感器的静态性能指标：灵敏度为0.3016V/mm、线性度为±1.47%、回程误差±0.1%、重复性误差±0.16%.

Design and Calibration of the Two-Dimensional Displacement Sensor

To measure the two-dimensional displacement of the object which makes plane motion,an area-variable two-dimensional inductive displacement sensor was designed.The principle of the sensor was analyzed in this paper.The specific structure of the sensor is that the two U-shaped cores and coils were placed in two perpendicular directions.When the armature core does plane motion at the top,the coil＇s inductance changes and is converted to the electrical signal proportional to the displacement by measuring circuit.Calibration tests were conducted on the sensor to get the static parameters： sensitivity 0.3016V/mm,linearity ±1.47%,reverse error ±0.1% and repeatability error ±0.16%.