Micromachined high-Q inductors in a 0.18-μm copper interconnectlow-k dielectric CMOS process

On-chip spiral micromachined inductors fabricated in a 0.18-μm digital CMOS process with 6-level copper interconnect and low-K dielectric are described. A post-CMOS maskless micromachining process compatible with the CMOS materials and design rules has been developed to create inductors suspended above the substrate with the inter-turn dielectric removed. Such inductors have higher quality factors as substrate losses are eliminated by silicon removal and increased self-resonant frequency due to reduction of inter-turn and substrate parasitic capacitances. Quality factors up to 12 were obtained for a 3.2-nH micromachined inductor at 7.5 GHz. Improvements of up to 180% in maximum quality factor, along with 40%-70% increase in self-resonant frequency were seen over conventional inductors. The effects of micromachining on inductor performance was modeled using a physics-based model with predictive capability. The model was verified by measurements at various stages of the post-CMOS processing. Micromachined inductor quality factor is limited by series resistance up to a predicted metal thickness of between 6-10 μm