压电微音叉扫描探针显微镜测头研究

压电微音叉具有良好的谐振特性，并易于实现其振动的检测。利用这些特性，与钨探针结合，构成了一种新型的表面轮廓扫描测头。该新型测头与X-Y压电工作台结合，采用与TM-AFM相同的工作原理，构成了扫描探针显微镜。介绍了压电微音叉扫描测头的构成、工作原理及主要特性，给出了所构成的扫描探针显微镜测量系统。通过实验及其结果，证明了新型测头具有高垂直分辨率、低破坏力等优点。除此之外，由于采用了有效长度大的钨探针，使大台阶微观表面的测量成为可能。

Research on a piezo-electrical micro-fork probe for SPM

Piezo-electrical micro-fork has good resonant property, and its vibration is easy to be measured. Based on these advantages of the micro-fork and combining with tungsten tip, a novel scanning probe stylus was proposed and fabricated. Cooperating with X-Y piezo-electrical scanner, and operating under the same mechanism of TM-AFM, the novel stylus was used to construct a scanning probe microscopy. The structure, operating mechanism and main parameters of the micro-fork stylus are explained, and an SPM system constructed from the micro-fork stylus is introduced. Experiment was carried out and the results show that the novel scanning probe stylus has the merits of high vertical resolution and low destruction on sample. Besides, the long effective length of the tungsten tip enables the scanning probe stylus to scan surface with large step microstructure.