A new technique for determining the capture cross section of theoxide traps in MOS structures

The use of an oxide voltage relaxation spectroscopy technique based on voltage-electron fluence measurements on a MOS structure under high constant current stresses for determining the trapping parameters in thin oxide is discussed. Oxide voltage relaxation spectroscopy is essentially an ultralow-speed real-fluence differential sampling technique. This technique has the benefits of accuracy, speed, and convenience, and it is useful for the study of complex oxide trap phenomena. This method has been used to determine the capture cross section of the oxide traps in thin SiO₂