Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O3 thin film on titanium substrate |
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| Authors: | Shuhei Matsushita Isaku Kanno Kazuhiko Adachi Ryuji Yokokawa Hidetoshi Kotera |
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| Affiliation: | 1. Department of Micro Engineering, Kyoto University, Yoshida-honmachi, Sakyo-ku, Kyoto, 606-8501, Japan
2. Department of Mechanical Engineering, Kobe University, Rokkodai-cho, Nada-ku, Kobe, 657-8501, Japan
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| Abstract: | We have developed a titanium (Ti)-based piezoelectric microelectromechanical systems scanner driven by a Pb(Zr, Ti)O3 (PZT) thin film for the development of laser scanning displays. The 2-μm-thick PZT thin film was directly deposited on a 50-μm-thick Ti substrate by radio frequency magnetron sputtering. Prior to PZT deposition, the Ti substrate was microfabricated into the shape of a horizontal scanner by wet etching; therefore, we could fabricate a piezoelectric microactuator without using the photolithography process. We confirmed the growth of the polycrystalline PZT film with perovskite structures on the Ti substrate. We achieved an optical scanning angle of 22° at a resonant frequency of 25.4?kHz using a driving voltage of 20?V pp. These horizontal scanning properties can be applicable for laser displays. |
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