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基于聚吡咯微电极的MEMS微型超级电容器的研究
引用本文:周扬.基于聚吡咯微电极的MEMS微型超级电容器的研究[J].电子器件,2011,34(1):1-6.
作者姓名:周扬
作者单位:清华大学精密仪器与机械学系;
基金项目:国家自然科学基金资助(613119)
摘    要:MEMS 微能源是指采用微加工技术制作实现能量的获取与转换、存储与释放的微纳器件与系统,而微型超级电容器则是一种基于电化学电容实现储能的微型能量存储器件,可作为能量存储单元在MEMS微电源系统中获得应用.设计制作了一种具有两腔并排式结构的微型聚吡咯超级电容器.该微型超级电容器南微结构,微电极功能薄膜以及酸性电解液构成,...

关 键 词:MEMS  微型超级电容器  聚吡咯  碳纳米管  比容量

Fabrication and Tests of a Micro-supercapacitor Using Polypyrrole-based Micro-electrode
ZHOU Yang,WANG Xiaofeng,ZHANG Gaofei,RUAN Yong,You Zheng.Fabrication and Tests of a Micro-supercapacitor Using Polypyrrole-based Micro-electrode[J].Journal of Electron Devices,2011,34(1):1-6.
Authors:ZHOU Yang  WANG Xiaofeng  ZHANG Gaofei  RUAN Yong  You Zheng
Affiliation:ZHOU Yang,WANG Xiaofeng,ZHANG Gaofei,RUAN Yong,YOU Zheng(Department of Precision Instrument & Mechanology,Tsinghua University,Beijing 100084,China)
Abstract:MEMS micro-energy indicates the micro-fabrication technology that can be used to attain the micro-devices and systems of energy acquisition and conversion,storage and release,while the micro-supercapacitor is a micro-energy storage device based on electrochemical energy storage mechanism.A micro-supercapacitor was designed and fabricated with a side-by-side electrode configuration structure.It was constructed by micro-structure,feature film and acid electrolyte,in which the micro-structure was made by the m...
Keywords:MEMS  micro-supercapacitor  PPY  nanotube  Specific capacity  
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