Comparison in interfacial phenomena in electric-field assisted anodic bonding of Kovar-glass and Kovar/Al film-glass |
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Authors: | Chen Zheng |
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Affiliation: | Department of Materials Engineering,East China Shipbuilding Institute,Zhenjiang,212003 |
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Abstract: | Anodic bonding of Kovar-glass and Kovar/Al film-glass were performed at temperatures of 513 K to 663 K under the static electric voltage of 500 V, in order to compare the interfacial phenomena in electric-field assisted anodic bonding of Kovar-glass and Al-glass . SEM and EPMA were used to observe and analyzed the interfacial region. The growth rate of the alkali ions depletion layers in Kovar/Al-glass joint was slower than that in Kovar-glass joint. But the activation energies for the growth of depletion layers are about the same for both kinds of joint. |
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Keywords: | anodic bonding glass Kovar alloy aluminum depletion layer growth rate |
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