| 离子束刻蚀菲涅耳金环研究 |
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| 引用本文： | 傅新定 方红丽. 离子束刻蚀菲涅耳金环研究[J]. 核技术, 1989, 12(5): 292-295 |
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| 作者姓名： | 傅新定 方红丽 |
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| 作者单位： | 中国科学院上海冶金研究所(傅新定)，中国科学院上海冶金研究所(方红丽) |
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| 摘 要： |
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| 关 键 词： | 离子速刻蚀 射角 菲湿耳金环 |
Ion beam etching for making Fresnel Au-zone plates |
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| Fu Xinding Fang Hongli. Ion beam etching for making Fresnel Au-zone plates[J]. Nuclear Techniques, 1989, 12(5): 292-295 |
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| Authors: | Fu Xinding Fang Hongli |
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| Abstract: | The Fresnel Au-zone plates and the multiple-pin-hole Au-foils are microfabricated using ion beam etching technique. The key points how to determine the etching rate and the relation between terrace sloping angle and etching parameters are indicated. The plates and foils so obtained have greatly improved the resolving power of the coded imaging camera and have been successfully used to measure the spacial distribution of laser plasma and to diagnose of nuclear fusion. |
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| Keywords: | Ion beam etching Incident angle of ion beam |
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